Integration of low loss vertical slot waveguides on SOI photonic

However, this topic is not part of the presented work In order to evaluate the possibility of producing fully slot die

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slotxo168 28 T Thiessen, P Grosse, J Da Fonseca, P Billondeau, B Szelag, C Jany, J k, S Poon, and S Menezo, “30 GHz heterogeneously